3nm to catch up with TSMC? Samsung will be the first to adopt high-end EUV film

According to Taiwanese media DIGITIMES, Samsung Electronics will use the latest EUV film (pellicle) with a light transmittance of more than 90% in its 3nm process to improve yield. These films will come from the Korean company S&S Tech.

S&S Tech, a photomask material (Blankmask) company, successfully developed a semiconductor EUV film with a light transmittance of 90% in 2021, becoming another company besides ASML that has successfully developed an EUV film with a light transmittance of more than 90%. film company. ChosunBiz reported that according to industry insiders, S&S Tech will enter mass production of EUV films with a light transmittance exceeding 90% in the first half of 2023 at the earliest. S&S Tech's goal is to increase the ratio to 94% at Samsung's request.

Among the semiconductor material and equipment suppliers invested by Samsung, S&S Tech received the most investment funds. In July 2020, Samsung acquired an 8% stake in S&S Tech through a capital injection of 65.8 billion won ($52 million).

It is reported that the thin film plays a vital role in the EUV process era, which can prevent the EUV from being polluted and causing poor yield performance.

Samsung will use a film with a light transmittance of more than 90% to minimize the loss of light sources and stabilize the production yield of its 3nm chips.

According to reports, no wafer foundry has adopted a film with a light transmittance of more than 90%. At present, major EUV film suppliers include ASML in the Netherlands, Mitsui Chemicals in Japan, S&S Tech and FST, which are both Korean companies. Samsung is now investing in S&S Tech and FST to develop its own EUV film.

Analysts and experts specializing in semiconductors interviewed by Business Next estimate that TSMC’s current 3nm yield rate may be as low as 60% to 70%, or as high as 75% to 80%. At the same time, financial analyst Dan Nystedt also tweeted that TSMC's current 3nm yield rate is similar to 5nm yield rate in the early stages of its production, and according to media reports, its yield rate may be as high as 80%.