Inpria Sues Lam Research Over EUV Patent

According to reports from international media, Japan-based extreme ultraviolet (EUV) photoresist developer Inpria Corporation has filed a patent infringement lawsuit against Lam Research. The legal action was initiated in the U.S. District Court for the District of Delaware.

Inpria alleges that Lam Research has infringed on its patented EUV photoresist technology. The company is seeking a court order to prohibit the sale of specific types of dry photoresists and is also pursuing claims for damages.

“Inpria has made significant investments in the development of new materials and technologies. We are confident that our patent rights will be upheld in this matter,” said Andrew Grenville, CEO of Inpria, in an official statement.

The company did not disclose the specific amount of damages it is seeking. Founded in 2007, Inpria has received strategic support from key players in the semiconductor industry over the years. It is now a wholly owned subsidiary of Japanese semiconductor materials giant JSR Corporation.

This legal development highlights the increasing competition and innovation challenges in the EUV lithography sector, which plays a critical role in the manufacturing of advanced semiconductor components.